Experimental study of breakdown voltage and effective secondary electron emission coefficient for a micro-plasma device
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چکیده
منابع مشابه
Experimental study of breakdown voltage and effective secondary electron emission coefficient for a micro-plasma device
A micro-plasma device is used as a gas sensor. The micro-plasma device produces dc discharges with a parallel-plane electrode configuration. In this paper the breakdown voltage is measured for argon with tin oxide electrodes, for three different electrode distances (0.01 cm, 0.025 cm and 0.05 cm) and for pressure between 1.3 kPa and 13.3 kPa. The effective secondary electron emission coefficien...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2004
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/13/2/003